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portada Guide to Characteristics and Characterization of Semiconductor Surfaces
Type
Physical Book
Author
Publisher
Language
English
Pages
220
Format
Hardcover
ISBN13
9789811254819
Categories

Guide to Characteristics and Characterization of Semiconductor Surfaces

Jerzy Ruzyllo (Author) · World Scientific Publishing Company · Hardcover

Guide to Characteristics and Characterization of Semiconductor Surfaces - Ruzyllo, Jerzy

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Synopsis "Guide to Characteristics and Characterization of Semiconductor Surfaces"

This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features.Based on the author's thirty years of research and teaching in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers, and professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring.

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