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CMOS Plasma and Process Damage
Kirk Prall
CMOS Plasma and Process Damage
Kirk Prall (Author) · Springer Nature Switzerland · Paperback
CMOS Plasma and Process Damage
Kirk Prall
This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to the chips, functional failure and reliability problems.
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