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portada ion sources
Type
Physical Book
Author
Illustrated by
Publisher
Year
2010
Language
English
Pages
476
Format
Paperback
Dimensions
23.4x15.6x2.5 cm
Weight
0.69 kg.
ISBN
3642085024
ISBN13
9783642085024
Categories

ion sources

Huashun Zhang (Author) · Jianrong Zhang (Illustrated by) · Springer · Paperback

ion sources - Zhang, Jianrong ; Zhang, Huashun

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Synopsis "ion sources"

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

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