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portada lpcvd silicon nitride and oxynitride films: material and applications in integrated circuit technology
Type
Physical Book
Publisher
Author
Year
1991
Language
English
Pages
159
ISBN
3540539549
ISBN13
9783540539544
Categories

lpcvd silicon nitride and oxynitride films: material and applications in integrated circuit technology

Habraken, F. H. P. M. (Author) · springer · Physical Book

lpcvd silicon nitride and oxynitride films: material and applications in integrated circuit technology - habraken, f. h. p. m.

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