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portada Nanofabrication: Techniques and Principles
Type
Physical Book
Publisher
Author
Language
English
Pages
344
Format
Paperback
ISBN13
9783709116661
Edition No.
2012th

Nanofabrication: Techniques and Principles

Stepanova Maria,Dew Steven (Author) · Springer · Paperback

Nanofabrication: Techniques and Principles - Stepanova Maria,Dew Steven

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Synopsis "Nanofabrication: Techniques and Principles"

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

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