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portada spectroscopic ellipsometry,principles and applications
spectroscopic ellipsometry,principles and applicationsspectroscopic ellipsometry,principles and applicationsspectroscopic ellipsometry,principles and applicationsspectroscopic ellipsometry,principles and applicationsspectroscopic ellipsometry,principles and applications
Type
Physical Book
Author
Publisher
Language
English
Pages
369
Format
Hardcover
Dimensions
23.2x16.1x2.6 cm
Weight
0.68 kg.
ISBN
0470016086
ISBN13
9780470016084
Categories

spectroscopic ellipsometry,principles and applications

Hiroyuki Fujiwara (Author) · Wiley · Hardcover

spectroscopic ellipsometry,principles and applications - Fujiwara, Hiroyuki

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Synopsis "spectroscopic ellipsometry,principles and applications"

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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