Name: Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
Price: 166.60 EUR
Availability: InStock
Author: G. Ritter;P. Wagner;H. , Germany) Richter
ISBN: 9780080436098

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portada Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

Type

Physical Book

Publisher

Elsevier Science Ltd

Author

G. Ritter;P. Wagner;H. , Germany) Richter

Collection

European Materials Research Society Symposia Proceedings

Year

1999

Pages

206

Format

Hardcover

Dimensions

27.90 x 21.00 cm

ISBN13

9780080436098

Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

G. Ritter;P. Wagner;H. , Germany) Richter (Author) · Elsevier Science Ltd · Hardcover

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Synopsis "Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment"

Includes papers that cover the E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment. This book covers a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, and wafer characterization.