Name: doping engineering for front-end processing: volume 1070
Price: 121.41 EUR
Availability: InStock
Author: Pawlak, B. J. ; Pelaz, M. L. ; Law, M.
ISBN: 9781605110400

Select your country

Americas

Europe

Rest of the world

portada doping engineering for front-end processing: volume 1070

doping engineering for front-end processing: volume 1070

Type

Physical Book

Illustrated by

B. J. Pawlak

M. L. Pelaz

M. Law

Publisher

Cambridge University Press

Author

Pawlak, B. J. ; Pelaz, M. L. ; Law, M.

Year

2008

Language

English

Pages

319

Format

Hardcover

Dimensions

23.4 x 16.0 x 2.3 cm

Weight

0.57 kg.

ISBN

160511040x

ISBN13

9781605110400

Synopsis "doping engineering for front-end processing: volume 1070"

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

Customers reviews

Have you read this book? Login to add your review.

More customer reviews

0% (0)
0% (0)
0% (0)
0% (0)
0% (0)

Questions and Answers about the Book

Do you have a question about the book? Login to be able to add your own question.

Opinions about Bookdelivery

More customer reviews

doping engineering for front-end processing: volume 1070 - Pawlak, B. J. ; Pelaz, M. L. ; Law, M.

Synopsis "doping engineering for front-end processing: volume 1070"

Customers reviews

Frequently Asked Questions about the Book

Is the book original?

In what language is the book written?

What is the format of this book?

Questions and Answers about the Book

Opinions about Bookdelivery