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portada Plasma Electronics. Applications in Microelectronic Device Fabrication
Type
Physical Book
Publisher
Author
Year
2026
Pages
444
Format
Hardcover
Dimensions
23.4x15.6 cm
ISBN13
9781041192237

Plasma Electronics. Applications in Microelectronic Device Fabrication

Toshiaki Makabe;Zoran Lj. Petrovic (Author) · CRC Press · Hardcover

Plasma Electronics. Applications in Microelectronic Device Fabrication - Toshiaki Makabe;Zoran Lj. Petrovic

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Synopsis "Plasma Electronics. Applications in Microelectronic Device Fabrication"

Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.

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